The Back Grinding Technology for Semiconductor device
نویسندگان
چکیده
منابع مشابه
Diamond semiconductor technology for RF device applications
This paper presents a comprehensive review of diamond electronics from the RF perspective. Our aim was to find and present the potential, limitations and current status of diamond semiconductor devices as well as to investigate its suitability for RF device applications. While doing this, we briefly analysed the physics and chemistry of CVD diamond process for a better understanding of the reas...
متن کاملIn-process force monitoring for precision grinding semiconductor silicon wafers
Forces generated during precision wafer grinding are small and present challenges for accurate and reliable process monitoring. In this work, these challenges are met by incorporating noncontact displacement sensors into an aerostatic spindle that is calibrated to measure grinding forces from the relative motion between the spindle rotor and stator. This arrangement allows the calculation of gr...
متن کاملDevelopment of a Vibration Device for Grinding with Microvibration
This study aimed to develop a device to facilitate grinding experiments with microvibration for analyzing the vibration effect on surface finish of ground surfaces. A microvibration device was designed and fabricated. It can be used to provide microvibration to the workpiece vertically and/or horizontally during grinding. The relationship of the driving voltage, vibration displacement, and freq...
متن کاملSemiconductor Technology for Internet Appliances
OVERVIEW: Advances in the Internet technology have brought about new services utilizing the Internet. Changes are also seen in the appliances used to enjoy these services. Specialized “Internet appliances” for Internet services are being increasingly used today in place of PCs. To this end, the importance of appliance architecture and system technology for these new services is increasing along...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Journal of the Japan Society for Precision Engineering
سال: 2007
ISSN: 1882-675X,0912-0289
DOI: 10.2493/jjspe.73.764